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Sub-wavelength to Nanoscale Thermal, Mechanical, and Optical Physics in Advanced Manufacturing
The development of scanning probe microscopy (SPM) techniques, including the scanning tunneling microscope (STM), atomic force microscope (AFM) and near-field scanning optical microscope (NSOM), has made it possible for high resolution imaging and advanced manufacturing at micro/nano-scales. Our work in this area has pioneered the study of sub-10 nm thermal field under the SPM tip, systematic optical-thermal field computation study of the SPM tip performance, and micro-scale resolved study of the thermal responses of SPM tip under laser irradiation.
Representative publications:
Spherical particles can act as spherical lens to induce nm-scale optical field to facilitate nanoscale manufacturing and surface structuring. Laser-assisted nanopatterning and nanoimprinting lithography has been proved to be able to pattern sub-10 nm features on a substrate. Large-area fabrication of nanoscale photonic structures using laser-assisted nanoimprinting of self-assembled particles has been reported. Our work in this area provides the first time quantitative experimental characterization of the thermal, stress, and optical fields under near-field focusing. A spatial resolution of 20 nm has been achieved. Also combined optical, thermal and mechanical modelings have been conducted to interpret and validate the experimental observations.
Representative publications: |